MKS Micro Vision2 Gas Analyzer Assembly Pfeiffer SplitFlow80 Vacuum AS-IS

This is an as-is MKS Gas Analyzer Assembly. Save thousands and buy used from Green Industrial today!

The motor in this listing has damage to the outside shell, the internal components are unharmed. Please see the pictures for more information.

Venting Valve Information

Manufacturer: Pfeiffer

Model: Venting Valve (shielded), 24V DC

Model No.: PM Z01 290

Connection Flanges, In and Out: G 1/8"

Inlet pressure max.: 1500 hPa (absolute)

Gas flow at atmospheric pressure: 130 hPa·l/s

Leakage rate: < 1 · 10-9 Pa m3/s, < 7.5 · 10-9 Torr l/s, < 1 · 10-8 mbar l/s

Vacuum Information

Manufacturer: Pfeiffer

Model: SplitFlow 80

Model No.: PM P04 013

Oil: PM 143 740-T

S(N₂): 67 l/s

n: 1500 Hz

f: 90000 1/min

Vacuum Information

Manufacturer: Pfeiffer

Mod.: TC 110

Mod. Nr.: PM C01790 A

Input: 24V DC ±5% 6.3A

Output: 0 - 24V 10 A, 0 - 1500 Hz

Gas Analyzer Information

Manufacturer: MKS

Family: Spectra

Type: Residual Gas Analyzer

Measurement Technique: Mass Spectrometry

Mass Range: 100, 200, or 300 amu

Detector: Faraday

Faraday: 1.5e-11 Torr (2e-11 mbar)

Filaments: Tungsten or Thoria coated Iridium

Maximum Analyzer Operating Pressure: 7.6e-5 Torr (1e-4 mbar)

Ion Source Sensitivity: 2e-4 A/mbar

Resolution: Better than 10% valley for peaks of equal height across mass range

Bake Out Temperature: 250°C (with extender or electronics removed)

Operating Temperature: 200°C Faraday only with electronics 10 - 40°C, 150°C Multiplier with electronics 10 - 40°C and pressure <1e-8 mbar, 90°C Multiplier with electronics 10 - 40°C and pressure <1e-5 mbar

Cross Beam Ion Source: Single, double, or triple, depending on configuration.

UHV Ion Source: Single, double, or triple, depending on configuration.

UHV Out-gassing Rate: <1e-9 mbar -l/s

PVD Ion Source: Single, double, or triple, depending on configuration.

Zero Blast Effect: Double & Triple Filter: <5 ppm baseline levels next to mass 2 (not applicable with 5 in. single version)

Maximum Operating Conditions: 10 - 40°C, 80% RH (non condensing)

Microchannel Plate: 3.8e-14 Torr (5e-14 mbar)

Single Channel EM: 7.6e-15 Torr (1e-14 mbar) triple configuration only

Electronics Weight on Flange: 1.7 kg

Data Acquisition Method: Dedicated real-time acquisition processor

Data Acquisition Speed: <3 ms per point for analog scanning

Data Collection Methods: Analog scanning, full mass range 8, 16 or 32 points/amu, Barchart scanning, Peak-jump collection of up to 15 peaks per scan, Complete recipe control to link multiple acquisition into a single scan, (Process Eye Professional and TOOLweb RGA only)

Settling Time: <20 ms (to 1 ppm of Maximum Signal)

Control Method: CE operating system processor with web-server interface

Command Structure: Documented ASCII command protocols

Multiplier Protection: Automatic removal of over-range peaks from all scan modes, dedicated multiplier inhibit line for over temperature or over-pressure and x-trip filament and multiplier protect for over-pressure

Number of Stored Source Settings: 6 sets including ion source parameters, alignment, resolution, detector calibrations, Stored in electronics and recalled by EasyView, Process Eye Professional, or TOOLweb RGA

Software Controlled Tuning Parameters: Electron energy, 20 - 100 eV, Emission current, 0 - 2 mA (5 mA degas), Ion energy, 0 - 10 V, Ion extraction, 0 to -130V, Filter pole bias, 0 to -10 to +10 V

Mounting Flange: DN 40 CF-F